An Investigation of Processes for Glass Micromachining

This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are...

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Detalles Bibliográficos
Autores principales: Van Toan, Nguyen, Toda, Masaya, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190300/
https://www.ncbi.nlm.nih.gov/pubmed/30407424
http://dx.doi.org/10.3390/mi7030051

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190300/
https://www.ncbi.nlm.nih.gov/pubmed/30407424
http://dx.doi.org/10.3390/mi7030051

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