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Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity
A scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-spring effect of the torsion-bar spring gener...
| Autores principales: | , , |
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| Formato: | Online Artigo Texto |
| Idioma: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en liña: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190333/ https://www.ncbi.nlm.nih.gov/pubmed/30400431 http://dx.doi.org/10.3390/mi8080240 |