Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity

A scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-spring effect of the torsion-bar spring gener...

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Detalles Bibliográficos
Autores principales: Izawa, Takashi, Sasaki, Takashi, Hane, Kazuhiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190333/
https://www.ncbi.nlm.nih.gov/pubmed/30400431
http://dx.doi.org/10.3390/mi8080240

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190333/
https://www.ncbi.nlm.nih.gov/pubmed/30400431
http://dx.doi.org/10.3390/mi8080240

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