Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator

A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (thickness) parameters on the effective electr...

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Detalles Bibliográficos
Autores principales: Li, Jian, Liu, Mengwei, Wang, Chenghao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190344/
https://www.ncbi.nlm.nih.gov/pubmed/30404332
http://dx.doi.org/10.3390/mi7090159

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190344/
https://www.ncbi.nlm.nih.gov/pubmed/30404332
http://dx.doi.org/10.3390/mi7090159

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