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The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner
In order to identify the influence of the vacuum environment on the performance of a comb-drive microscanner, and indicate the optimum pressure for enhancing its performance, a comb-drive microscanner fabricated on silicon-on-insulator (SOI) substrate was prepared and tested at different pressures,...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190352/ http://dx.doi.org/10.3390/mi8040126 |