Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry

Scanning broadband light interferometry (SBLI) has been widely utilized in surface metrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved throug...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhou, Yi, Tang, Yan, Yang, Yong, Hu, Song
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190357/
https://www.ncbi.nlm.nih.gov/pubmed/30400508
http://dx.doi.org/10.3390/mi8110319

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190357/
https://www.ncbi.nlm.nih.gov/pubmed/30400508
http://dx.doi.org/10.3390/mi8110319

Ejemplares similares