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Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS
In this paper, we investigate the stochastic effects of the microstructure of polysilicon films on the overall response of microelectromechanical systems (MEMS). A device for on-chip testing has been purposely designed so as to maximize, in compliance with the production process, its sensitivity to...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6190405/ https://www.ncbi.nlm.nih.gov/pubmed/30400439 http://dx.doi.org/10.3390/mi8080248 |