Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications

New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones, which are substituting for conventional electret c...

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Detalles Bibliográficos
Autores principales: Peña-García, Néstor N., Aguilera-Cortés, Luz A., González-Palacios, Max A., Raskin, Jean-Pierre, Herrera-May, Agustín L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6209879/
https://www.ncbi.nlm.nih.gov/pubmed/30347743
http://dx.doi.org/10.3390/s18103545

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6209879/
https://www.ncbi.nlm.nih.gov/pubmed/30347743
http://dx.doi.org/10.3390/s18103545

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