A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm(−2)·Hz(−1). The resonator is embedded in a fully on-chip Pierce oscillator sche...

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Detalles Bibliográficos
Autores principales: Perelló-Roig, Rafel, Verd, Jaume, Barceló, Joan, Bota, Sebastià, Segura, Jaume
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215116/
https://www.ncbi.nlm.nih.gov/pubmed/30424417
http://dx.doi.org/10.3390/mi9100484

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215116/
https://www.ncbi.nlm.nih.gov/pubmed/30424417
http://dx.doi.org/10.3390/mi9100484

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