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A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm(−2)·Hz(−1). The resonator is embedded in a fully on-chip Pierce oscillator sche...
Autores principales: | Perelló-Roig, Rafel, Verd, Jaume, Barceló, Joan, Bota, Sebastià, Segura, Jaume |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215116/ https://www.ncbi.nlm.nih.gov/pubmed/30424417 http://dx.doi.org/10.3390/mi9100484 |
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