A Novel, Hybrid-Integrated, High-Precision, Vacuum Microelectronic Accelerometer with Nano-Field Emission Tips

In this paper, a novel, hybrid-integrated, high-precision, vacuum microelectronic accelerometer is put forward, based on the theory of field emission; the accelerometer consists of a sensitive structure and an ASIC interface (application-specific integrated circuit). The sensitive structure has a ca...

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Detalles Bibliográficos
Autores principales: Liu, Haitao, Wei, Kai, Li, Zhengzhou, Huang, Wengang, Xu, Yi, Cui, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215125/
https://www.ncbi.nlm.nih.gov/pubmed/30424414
http://dx.doi.org/10.3390/mi9100481

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215125/
https://www.ncbi.nlm.nih.gov/pubmed/30424414
http://dx.doi.org/10.3390/mi9100481

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