On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these...

Descripción completa

Detalles Bibliográficos
Autores principales: Qiao, Zhiliang, Boom, Boris A., Annema, Anne-Johan, Wiegerink, Remco J., Nauta, Bram
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215180/
https://www.ncbi.nlm.nih.gov/pubmed/30424421
http://dx.doi.org/10.3390/mi9100488

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215180/
https://www.ncbi.nlm.nih.gov/pubmed/30424421
http://dx.doi.org/10.3390/mi9100488

Ejemplares similares