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On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers
Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215180/ https://www.ncbi.nlm.nih.gov/pubmed/30424421 http://dx.doi.org/10.3390/mi9100488 |