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Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage

This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employe...

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Detalles Bibliográficos
Autores principales: Gu, Yan, Chen, Xiuyuan, Lin, Jieqiong, Lu, Mingming, Lu, Faxiang, Zhang, Zheming, Yang, Hao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215217/
https://www.ncbi.nlm.nih.gov/pubmed/30424432
http://dx.doi.org/10.3390/mi9100499