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Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employe...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215217/ https://www.ncbi.nlm.nih.gov/pubmed/30424432 http://dx.doi.org/10.3390/mi9100499 |