Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications

Mastering non-evaporable getter (NEG) thin films by elucidating their activation mechanisms and predicting their sorption performances will contribute to facilitating their integration into micro-electro-mechanical systems (MEMS). For this aim, thin film based getters structured in single and multi-...

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Detalles Bibliográficos
Autores principales: Bourim, El-Mostafa, Kim, Hee Yeoun, Chung, Nak-Kwan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215255/
https://www.ncbi.nlm.nih.gov/pubmed/30424423
http://dx.doi.org/10.3390/mi9100490

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215255/
https://www.ncbi.nlm.nih.gov/pubmed/30424423
http://dx.doi.org/10.3390/mi9100490

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