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Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications
Mastering non-evaporable getter (NEG) thin films by elucidating their activation mechanisms and predicting their sorption performances will contribute to facilitating their integration into micro-electro-mechanical systems (MEMS). For this aim, thin film based getters structured in single and multi-...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215255/ https://www.ncbi.nlm.nih.gov/pubmed/30424423 http://dx.doi.org/10.3390/mi9100490 |