Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO(2) Suspended Film

In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, so they can be designed and fabricated on single-layer SiO(2) suspended film through a simplified process. Single-lay...

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Detalles Bibliográficos
Autores principales: Liu, Qi, Ding, Guifu, Wang, Yipin, Yao, Jinyuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215318/
https://www.ncbi.nlm.nih.gov/pubmed/30424447
http://dx.doi.org/10.3390/mi9100514

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215318/
https://www.ncbi.nlm.nih.gov/pubmed/30424447
http://dx.doi.org/10.3390/mi9100514

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