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Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO(2) Suspended Film
In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, so they can be designed and fabricated on single-layer SiO(2) suspended film through a simplified process. Single-lay...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215318/ https://www.ncbi.nlm.nih.gov/pubmed/30424447 http://dx.doi.org/10.3390/mi9100514 |