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Molecular dynamics modeling framework for overcoming nanoshape retention limits of imprint lithography
Complex nanoshaped structures (nanoshape structures here are defined as shapes enabled by sharp corners with radius of curvature <5 nm) have been shown to enable emerging nanoscale applications in energy, electronics, optics, and medicine. This nanoshaped fabrication at high throughput is well be...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6220163/ https://www.ncbi.nlm.nih.gov/pubmed/31057893 http://dx.doi.org/10.1038/s41378-018-0007-4 |