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Molecular dynamics modeling framework for overcoming nanoshape retention limits of imprint lithography

Complex nanoshaped structures (nanoshape structures here are defined as shapes enabled by sharp corners with radius of curvature <5 nm) have been shown to enable emerging nanoscale applications in energy, electronics, optics, and medicine. This nanoshaped fabrication at high throughput is well be...

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Detalles Bibliográficos
Autores principales: Cherala, Anshuman, Sreenivasan, S. V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6220163/
https://www.ncbi.nlm.nih.gov/pubmed/31057893
http://dx.doi.org/10.1038/s41378-018-0007-4