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Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging
The ultrasonic transducer industry is dominated by piezoelectric materials. As an emerging alternative, capacitive micromachined ultrasound transducers (CMUTs) offer wider bandwidth, better integration with electronics, and ease of fabricating large arrays. CMUTs have a sealed cavity between a fixed...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6220174/ https://www.ncbi.nlm.nih.gov/pubmed/31057907 http://dx.doi.org/10.1038/s41378-018-0022-5 |