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Effects Associated with Nanostructure Fabrication Using In Situ Liquid Cell TEM Technology
We studied silicon, carbon, and SiC(x) nanostructures fabricated using liquid-phase electron-beam-induced deposition technology in transmission electron microscopy systems. Nanodots obtained from fixed electron beam irradiation followed a universal size versus beam dose trend, with precursor concent...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer Berlin Heidelberg
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6223903/ https://www.ncbi.nlm.nih.gov/pubmed/30464986 http://dx.doi.org/10.1007/s40820-015-0054-4 |