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Hydrogen Gas Sensor Based on Nanocrystalline SnO(2) Thin Film Grown on Bare Si Substrates
In this paper, high-quality nanocrystalline SnO(2) thin film was grown on bare Si (100) substrates by a sol–gel method. A metal–semiconductor–metal gas sensor was fabricated using nanocrystalline SnO(2) thin film and palladium (Pd) metal. The contact between Pd and nanocrystalline SnO(2) film is tun...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer Berlin Heidelberg
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6223920/ https://www.ncbi.nlm.nih.gov/pubmed/30464990 http://dx.doi.org/10.1007/s40820-015-0057-1 |