Coherent Tabletop EUV Ptychography of Nanopatterns

Coherent diffraction imaging (CDI) or lensless X-ray microscopy has become of great interest for high spatial resolution imaging of, e.g., nanostructures and biological specimens. There is no optics required in between an object and a detector, because the object can be fully recovered from its far-...

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Detalles Bibliográficos
Autores principales: Truong, Nguyen Xuan, Safaei, Reza, Cardin, Vincent, Lewis, Scott M., Zhong, Xiang Li, Légaré, François, Denecke, Melissa A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6232105/
https://www.ncbi.nlm.nih.gov/pubmed/30420602
http://dx.doi.org/10.1038/s41598-018-34257-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6232105/
https://www.ncbi.nlm.nih.gov/pubmed/30420602
http://dx.doi.org/10.1038/s41598-018-34257-2

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