Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process

This paper presents a micromachined monocrystalline silicon piezoresistive temperature sensor fabricated by a surface micromachining CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro-Electro-Mechanical System) process. The design of the temperature sensor is based on the structure of the mu...

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Detalles Bibliográficos
Autores principales: Cai, Chunhua, Tan, Junyan, Hua, Di, Qin, Ming, Zhu, Nianfang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6244008/
https://www.ncbi.nlm.nih.gov/pubmed/30459315
http://dx.doi.org/10.1038/s41598-018-35113-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6244008/
https://www.ncbi.nlm.nih.gov/pubmed/30459315
http://dx.doi.org/10.1038/s41598-018-35113-z

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