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Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors
In this paper, the design of MEMS piezoresistive out-of-plane shear and normal stress sensor is described. To improve the sensor sensitivity, a methodology by the incorporation of stress concentration regions, namely surface trenches in the proximity of sensing elements was explored in detail. The f...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263502/ https://www.ncbi.nlm.nih.gov/pubmed/30400190 http://dx.doi.org/10.3390/s18113737 |