Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films

In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning electron microscopes), a tuneable Q-factor of...

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Detalles Bibliográficos
Autores principales: Fischeneder, Martin, Oposich, Martin, Schneider, Michael, Schmid, Ulrich
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263779/
https://www.ncbi.nlm.nih.gov/pubmed/30423949
http://dx.doi.org/10.3390/s18113842

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263779/
https://www.ncbi.nlm.nih.gov/pubmed/30423949
http://dx.doi.org/10.3390/s18113842

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