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Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning electron microscopes), a tuneable Q-factor of...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263779/ https://www.ncbi.nlm.nih.gov/pubmed/30423949 http://dx.doi.org/10.3390/s18113842 |