Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculat...

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Detalles Bibliográficos
Autores principales: Li, Yiyuan, Li, Jianhua, Xu, Lixin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265712/
https://www.ncbi.nlm.nih.gov/pubmed/30453626
http://dx.doi.org/10.3390/mi9110604

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265712/
https://www.ncbi.nlm.nih.gov/pubmed/30453626
http://dx.doi.org/10.3390/mi9110604

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