Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation.