Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculat...

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Detalles Bibliográficos
Autores principales: Li, Yiyuan, Li, Jianhua, Xu, Lixin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265712/
https://www.ncbi.nlm.nih.gov/pubmed/30453626
http://dx.doi.org/10.3390/mi9110604
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author Li, Yiyuan
Li, Jianhua
Xu, Lixin
author_facet Li, Yiyuan
Li, Jianhua
Xu, Lixin
author_sort Li, Yiyuan
collection PubMed
description Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation.
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spelling pubmed-62657122018-12-06 Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates Li, Yiyuan Li, Jianhua Xu, Lixin Micromachines (Basel) Article Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation. MDPI 2018-11-17 /pmc/articles/PMC6265712/ /pubmed/30453626 http://dx.doi.org/10.3390/mi9110604 Text en © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Yiyuan
Li, Jianhua
Xu, Lixin
Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title_full Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title_fullStr Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title_full_unstemmed Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title_short Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates
title_sort method of calculating the inductance value of mems suspended inductors with silicon substrates
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265712/
https://www.ncbi.nlm.nih.gov/pubmed/30453626
http://dx.doi.org/10.3390/mi9110604
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AT lijianhua methodofcalculatingtheinductancevalueofmemssuspendedinductorswithsiliconsubstrates
AT xulixin methodofcalculatingtheinductancevalueofmemssuspendedinductorswithsiliconsubstrates

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