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Investigation of Material Constants of CaTiO(3) Doped (K,Na)NbO(3) Film by MEMS-Based Test Elements
A CaTiO(3)-doped (K,Na)NbO(3) (KNN-CT) film is a lead-free piezoelectric film that is expected to substitute Pb(Zr,Ti)O(3) (PZT) film in piezoelectric micro electro mechanical systems (MEMS). However, the full set of the material constants (elastic constants, piezoelectric constants and dielectric c...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265785/ https://www.ncbi.nlm.nih.gov/pubmed/30715057 http://dx.doi.org/10.3390/mi9110558 |