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Investigation of Material Constants of CaTiO(3) Doped (K,Na)NbO(3) Film by MEMS-Based Test Elements

A CaTiO(3)-doped (K,Na)NbO(3) (KNN-CT) film is a lead-free piezoelectric film that is expected to substitute Pb(Zr,Ti)O(3) (PZT) film in piezoelectric micro electro mechanical systems (MEMS). However, the full set of the material constants (elastic constants, piezoelectric constants and dielectric c...

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Detalles Bibliográficos
Autores principales:	Kaneko, Ryosuke, Kadota, Michio, Ohashi, Yuji, Kushibiki, Jun-ichi, Ikeuchi, Shinsuke, Tanaka, Shuji
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265785/ https://www.ncbi.nlm.nih.gov/pubmed/30715057 http://dx.doi.org/10.3390/mi9110558

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