Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers

With the continuous advancements in microelectromechanical systems (MEMS) fabrication technology, inertial sensors like accelerometers and gyroscopes can be designed and manufactured with smaller footprint and lower power consumption. In the literature, there are several reported accelerometer desig...

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Detalles Bibliográficos
Autores principales: Mohammed, Zakriya, Elfadel, Ibrahim (Abe) M., Rasras, Mahmoud
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266379/
https://www.ncbi.nlm.nih.gov/pubmed/30453536
http://dx.doi.org/10.3390/mi9110602

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266379/
https://www.ncbi.nlm.nih.gov/pubmed/30453536
http://dx.doi.org/10.3390/mi9110602

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