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A Temperature-Compensated Single-Crystal Silicon-on-Insulator (SOI) MEMS Oscillator with a CMOS Amplifier Chip

Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-term stability of such MEMS-referenced oscillators....

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Detalles Bibliográficos
Autores principales: Islam, Mohammad S., Wei, Ran, Lee, Jaesung, Xie, Yong, Mandal, Soumyajit, Feng, Philip X.-L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266509/
https://www.ncbi.nlm.nih.gov/pubmed/30715058
http://dx.doi.org/10.3390/mi9110559