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A Temperature-Compensated Single-Crystal Silicon-on-Insulator (SOI) MEMS Oscillator with a CMOS Amplifier Chip

Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-term stability of such MEMS-referenced oscillators....

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Detalles Bibliográficos
Autores principales:	Islam, Mohammad S., Wei, Ran, Lee, Jaesung, Xie, Yong, Mandal, Soumyajit, Feng, Philip X.-L.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266509/ https://www.ncbi.nlm.nih.gov/pubmed/30715058 http://dx.doi.org/10.3390/mi9110559

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