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Reduction of Parasitic Capacitance of A PDMS Capacitive Force Sensor
Polymer-based flexible micro electro mechanical systems (MEMS) tactile sensors have been widely studied for a variety of applications, such as medical and robot fields. The small size and flexibility are of great advantage in terms of accurate measurement and safety. Polydimethylsiloxane (PDMS) is o...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266689/ https://www.ncbi.nlm.nih.gov/pubmed/30715069 http://dx.doi.org/10.3390/mi9110570 |