Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

The integrity and reliability of surface protective coatings deposited on metal surface could be in-situ monitored via the attractive luminescence sensing technique. In this paper, we report the influence of substrate temperature on the properties of erbium (Er) doped aluminum nitride (AlN) film, wh...

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Detalles Bibliográficos
Autores principales: Fang, Liping, Jiang, Yidong, Zhu, Shengfa, Ding, Jingjing, Zhang, Dongxu, Yin, Anyi, Chen, Piheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266760/
https://www.ncbi.nlm.nih.gov/pubmed/30404205
http://dx.doi.org/10.3390/ma11112196

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266760/
https://www.ncbi.nlm.nih.gov/pubmed/30404205
http://dx.doi.org/10.3390/ma11112196

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