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Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health
The integrity and reliability of surface protective coatings deposited on metal surface could be in-situ monitored via the attractive luminescence sensing technique. In this paper, we report the influence of substrate temperature on the properties of erbium (Er) doped aluminum nitride (AlN) film, wh...
Autores principales: | Fang, Liping, Jiang, Yidong, Zhu, Shengfa, Ding, Jingjing, Zhang, Dongxu, Yin, Anyi, Chen, Piheng |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266760/ https://www.ncbi.nlm.nih.gov/pubmed/30404205 http://dx.doi.org/10.3390/ma11112196 |
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