Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elasti...

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Detalles Bibliográficos
Autores principales: Wang, Fufu, Zhang, Lu, Li, Long, Qiao, Zhihong, Cao, Qian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6267583/
https://www.ncbi.nlm.nih.gov/pubmed/30715066
http://dx.doi.org/10.3390/mi9110567

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6267583/
https://www.ncbi.nlm.nih.gov/pubmed/30715066
http://dx.doi.org/10.3390/mi9110567

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