Dry Etching of Copper Phthalocyanine Thin Films: Effects on Morphology and Surface Stoichiometry

We investigate the evolution of copper phthalocyanine thin films as they are etched with argon plasma. Significant morphological changes occur as a result of the ion bombardment; a planar surface quickly becomes an array of nanopillars which are less than 20 nm in diameter. The changes in morphology...

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Detalles Bibliográficos
Autores principales: Dijken, Jaron G. Van, Brett, Michael J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6268232/
https://www.ncbi.nlm.nih.gov/pubmed/22922282
http://dx.doi.org/10.3390/molecules170910119

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6268232/
https://www.ncbi.nlm.nih.gov/pubmed/22922282
http://dx.doi.org/10.3390/molecules170910119

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