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Morphology and N(2) Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes

The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), a...

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Detalles Bibliográficos
Autores principales: Fernandez, Ekain, Sanchez-Garcia, Jose Angel, Viviente, Jose Luis, van Sint Annaland, Martin, Gallucci, Fausto, Pacheco Tanaka, David A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6274305/
https://www.ncbi.nlm.nih.gov/pubmed/26875977
http://dx.doi.org/10.3390/molecules21020210