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Morphology and N(2) Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes
The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), a...
Autores principales: | Fernandez, Ekain, Sanchez-Garcia, Jose Angel, Viviente, Jose Luis, van Sint Annaland, Martin, Gallucci, Fausto, Pacheco Tanaka, David A. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6274305/ https://www.ncbi.nlm.nih.gov/pubmed/26875977 http://dx.doi.org/10.3390/molecules21020210 |
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