High Anodic-Voltage Focusing of Charge Carriers in Silicon Enables the Etching of Regularly-Arranged Submicrometer Pores at High Density and High Aspect-Ratio

The anodic dissolution of silicon in acidic electrolytes is a well-known technology enabling the silicon machining to be accurately controlled down to the micrometer scale in low-doped n-type silicon electrodes. Attempts to scale down this technology to the submicrometer scale has shown to be challe...

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Detalles Bibliográficos
Autores principales: Cozzi, Chiara, Polito, Giovanni, Strambini, Lucanos M., Barillaro, Giuseppe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Frontiers Media S.A. 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6287200/
https://www.ncbi.nlm.nih.gov/pubmed/30560118
http://dx.doi.org/10.3389/fchem.2018.00582

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6287200/
https://www.ncbi.nlm.nih.gov/pubmed/30560118
http://dx.doi.org/10.3389/fchem.2018.00582

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