Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film

A novel relative humidity sensor that is based on a linear piezoelectric micromachined ultrasonic transducer (pMUT) array was proposed and microfabricated for high sensitivity, fast response, and good stability. The humidity-sensitive graphene oxide (GO) film was deposited on the pMUT array with a f...

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Detalles Bibliográficos
Autores principales: Sun, Changhe, Shi, Qiongfeng, Yazici, Mahmut Sami, Lee, Chengkuo, Liu, Yufei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308462/
https://www.ncbi.nlm.nih.gov/pubmed/30544656
http://dx.doi.org/10.3390/s18124352

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308462/
https://www.ncbi.nlm.nih.gov/pubmed/30544656
http://dx.doi.org/10.3390/s18124352

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