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Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film
A novel relative humidity sensor that is based on a linear piezoelectric micromachined ultrasonic transducer (pMUT) array was proposed and microfabricated for high sensitivity, fast response, and good stability. The humidity-sensitive graphene oxide (GO) film was deposited on the pMUT array with a f...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308462/ https://www.ncbi.nlm.nih.gov/pubmed/30544656 http://dx.doi.org/10.3390/s18124352 |