Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic...

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Detalles Bibliográficos
Autores principales: Li, Rui-Jun, Xu, Peng, Wang, Peng-Yu, Fan, Kuang-Chao, Cheng, Rong-Jun, Huang, Qiang-Xian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308678/
https://www.ncbi.nlm.nih.gov/pubmed/30513843
http://dx.doi.org/10.3390/s18124229

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308678/
https://www.ncbi.nlm.nih.gov/pubmed/30513843
http://dx.doi.org/10.3390/s18124229

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