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Bonding Strength of a Glass Microfluidic Device Fabricated by Femtosecond Laser Micromachining and Direct Welding

We present a rapid and highly reliable glass (fused silica) microfluidic device fabrication process using various laser processes, including maskless microchannel formation and packaging. Femtosecond laser assisted selective etching was adopted to pattern microfluidic channels on a glass substrate a...

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Detalles Bibliográficos
Autores principales: Kim, Sungil, Kim, Jeongtae, Joung, Yeun-Ho, Choi, Jiyeon, Koo, Chiwan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6315772/
https://www.ncbi.nlm.nih.gov/pubmed/30513880
http://dx.doi.org/10.3390/mi9120639