Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices

The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a reusable carrier wafer. This necessitates a sacrificial...

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Detalles Bibliográficos
Autores principales: Tatikonda, Anand, Jokinen, Ville P., Evard, Hanno, Franssila, Sami
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316518/
https://www.ncbi.nlm.nih.gov/pubmed/30572576
http://dx.doi.org/10.3390/mi9120673

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316518/
https://www.ncbi.nlm.nih.gov/pubmed/30572576
http://dx.doi.org/10.3390/mi9120673

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