Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators

This paper attempts to qualitatively identify the static pull-in position, pull-in voltage, and fundamental frequency of one-electrode microresonators from a physical perspective. During theoretical derivation, a generalized one-degree-of-freedom (1-DOF) model in nondimensional form derived using th...

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Detalles Bibliográficos
Autores principales: Han, Jianxin, Li, Lei, Jin, Gang, Ma, Wenkui, Feng, Jingjing, Jia, Haili, Chang, Dongmei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316786/
https://www.ncbi.nlm.nih.gov/pubmed/30469544
http://dx.doi.org/10.3390/mi9120614

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6316786/
https://www.ncbi.nlm.nih.gov/pubmed/30469544
http://dx.doi.org/10.3390/mi9120614

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